MEMS mass flow sensor
Featuring a redesigned internal flow path, a differential pressure type mass flow sensor produces a low flow of 70 mL/min with a high impedance sensor that has a differential pressure range of 0-250. The redesigned mass flow sensor from Omron Corp, Schaumburg, IL, uses the manufacturer’s mass flow MEMS chip and the same external structure of its D6F-P0010A1 product.
When used in a bypass-type design or a set-up similar to a differential pressure sensor, this redesigned sensor is not sensitive to variations in the bypass tube length and can be used for tubing in damper controls.
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